Single electron transistor and method of manufacturing the same

ABSTRACT

A single electron transistor includes source/drain layers disposed apart on a substrate, at least one nanowire channel connecting the source/drain layers, a plurality of oxide channel areas in the nanowire channel, the oxide channel areas insulating at least one portion of the nanowire channel, a quantum dot in the portion of the nanowire channel insulated by the plurality of oxide channel areas, and a gate electrode surrounding the quantum dot.

BACKGROUND OF THE INVENTION

1. Field of the Invention

Example embodiments relate to a semiconductor device and a method ofmanufacturing the same and, more particularly, to a single electrontransistor and a method of manufacturing the same.

2. Description of the Related Art

In order to increase a degree of integration of a semiconductor device,the size of unit cells should be reduced. However, various technicaldifficulties may arise in attempting such a reduction. Further, evenwhen the sizes are reduced, unexpected problems may be undesirablygenerated. For example, electrons in a channel region may be decreasedin number to several tens of electrons, and a ratio of the number ofelectrons corresponding to statistical errors to the number of totalelectrons operating in the unit cells may be increased, therebyaffecting a reliability of the operations of the unit cells. Thus, thereis a demand for unit cells having a structure suitable for a high degreeof integration.

One approach to achieving a high degree of integration is to employ asingle electron transistor (SET), in which each electron may becontrolled. In a SET, movements of a single electron may be controlledby adjusting a voltage applied to the transistor and the movements ofthe single electron may serve as a switch. For example, when asemiconductor particle having a size of about several nanometers toabout several tens of nanometers, i.e., a quantum dot, is placed in aregion between a source region and a drain region, a single electron mayenter and leave the quantum dot by a single electron charging effect,such that an on-state and an off-state may be generated, which serves asa switch. When the SET is compared to a conventionalmetal-oxide-semiconductor field effect transistor (MOSFET), the numberof electrons required for performing the same action in the SET may bemuch smaller than that required for the MOSFET, and thus powerconsumption may be decreased using the SET. Additionally, a reliabilityof the SET may be improved because each of the electrons may becontrollable.

However, quantum dots are difficult to form uniformly with conventionaltechniques, and thus the SET has not been made easily manufacturable. Inparticular, forming a quantum dot having a size of about 10 nm or lesspresents difficulties using known photolithographic approaches.Moreover, the formation of quantum dots having a desired size using ane-beam direct writing method may be difficult because of the proximityeffect.

Thus, there is a need for a method of reproducibly forming a quantum dothaving a controlled size, e.g., several nanometers, in a SET. Further,there is a need for a method of forming a quantum dot in a desiredlocation in the SET. Preferably, such a method would provide a quantumdot having a size of several nanometers in a gate-all-around (GAA)-typetransistor, wherein a channel region is surrounded by a gate electrodein order to decrease short channel effects.

SUMMARY OF THE INVENTION

Embodiments are therefore directed to a single electron transistor and amethod of manufacturing the same, which substantially overcome one ormore of the problems due to the limitations and disadvantages of therelated art.

It is therefore a feature of an embodiment to provide a single electrontransistor having one or more quantum dots of a predetermined dimension,and a method of making the same.

It is therefore another feature of an embodiment to provide a singleelectron transistor having one or more quantum dots in predeterminedlocations, and a method of making the same.

At least one of the above and other features and advantages may berealized by providing a single electron transistor, includingsource/drain layers disposed apart on a substrate, at least one nanowirechannel connecting the source/drain layers, a plurality of oxide channelareas in the nanowire channel, the oxide channel areas insulating atleast one portion of the nanowire channel, a quantum dot in the portionof the nanowire channel insulated by the plurality of oxide channelareas, and a gate electrode surrounding the quantum dot.

The nanowire channel may include a first oxide channel area and a secondoxide channel area, the first oxide channel area may be surrounded bythe gate electrode, and the second oxide channel area may be disposedadjacent to a surface of the gate electrode.

The single electron transistor may further include an oxide layer at thesurface of the gate electrode. The second oxide channel area may beconnected to the oxide layer.

The nanowire channel may include another second oxide channel area, theother second oxide channel area may be disposed adjacent to a secondsurface of the gate electrode, the quantum dot may be between the firstoxide channel area and the second oxide channel area, and a secondquantum dot may be between the first oxide channel area and the othersecond oxide channel area.

The nanowire channel may have an extending portion that extends betweena source/drain region and the second oxide channel area, and theextending portion may be surrounded by an oxide layer.

The nanowire channel may include two oxide channel areas, each oxidechannel area may be disposed adjacent to one of two opposing surfaces ofthe gate electrode, and the quantum dot may be between the two oxidechannel areas.

The quantum dot may have a thickness of about 2 to about 5 nanometers.

The quantum dot may be a section of the nanowire channel, and thequantum dot and the nanowire channel may have a same thickness.

At least two nanowire channels may connect the source/drain layers, eachnanowire channel may have an oxide channel area disposed adjacent to asame side of the gate electrode, and each nanowire channel may besurrounded by a channel oxide layer, the channel oxide layer beingsurrounded by the gate electrode.

The single electron transistor may further include an oxide layer at thesame side of the gate electrode. The oxide layer may be connected toeach of the oxide channel areas adjacent to the same side of the gateelectrode.

At least one of the above and other features and advantages may also berealized by providing a method of manufacturing a single electrontransistor, including forming source/drain layers disposed apart on asubstrate, at least one nanowire channel connecting the source/drainlayers, forming a plurality of oxide channel areas in the nanowirechannel, the oxide channel areas insulating at least one portion of thenanowire channel and a quantum dot being in the portion of the nanowirechannel insulated by the plurality of oxide channel areas, and forming agate electrode that surrounds the quantum dot.

Forming the plurality of oxide channel areas may include oxidizing aportion of the nanowire channel adjacent to a surface of the gateelectrode.

The method may further include forming an oxide layer at the surface ofthe gate electrode, the oxide layer being connected to the oxidizedportion of the nanowire channel.

Forming the plurality of oxide channel areas in the nanowire channel mayinclude forming a first oxide channel area in the nanowire channel suchthat the first oxide channel area is surrounded by the gate electrode,and forming a second oxide channel area in the nanowire channel adjacentto a surface of the gate electrode.

Forming the first oxide channel area may include, prior to forming thegate electrode, forming a first sacrificial material on the nanowirechannel, partially etching the first sacrificial layer to thin a portionof the first sacrificial material, oxidizing a portion of the nanowirechannel that corresponds to the thinned portion of the first sacrificialmaterial, and removing the first sacrificial material from the nanowirechannel after the oxidation.

The method may further include, after removing the first sacrificialmaterial, oxidizing a surface of the nanowire channel to form an oxidelayer thereon, such that, after forming the gate electrode, the oxidizedsurface of the nanowire channel is between the nanowire channel and thegate electrode.

Forming the second oxide channel area may include forming an oxide layerat a surface of the gate electrode, and oxidizing a portion of thenanowire channel. The oxidized portion of the nanowire channel may beconnected to the oxide layer.

Forming the nanowire channel may include forming a sacrificial layer onthe substrate, forming a channel layer on the sacrificial layer,partially removing the channel layer and the sacrificial layer to formthe nanowire channel, the source/drain layers, a first sacrificial layerpattern beneath the nanowire channel, and a pair of second sacrificiallayer patterns beneath the source/drain layers. The second sacrificiallayer patterns may be disposed apart from each other and may beconnected by the first sacrificial layer pattern, and the source/drainlayers may be connected by the nanowire channel. Forming the nanowirechannel may further include removing the first sacrificial layer patternfrom beneath the nanowire channel.

The channel layer may be single crystalline silicon, and the sacrificiallayer may include silicon germanium.

The nanowire channel may be surrounded by a channel oxide layer, andforming the gate electrode may include surrounding the nanowire channelbetween the source/drain layers with a gate conductive layer, andpartially removing the gate conductive layer to form the gate electrode,the gate electrode being disposed apart from the source/drain layers,and the channel oxide layer being between the nanowire channel and thegate electrode.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantages will become more apparent tothose of ordinary skill in the art by describing in detail exampleembodiments with reference to the attached drawings, in which:

FIG. 1A illustrates a cross-sectional view of a single electrontransistor in accordance with an example embodiment;

FIG. 1B illustrates a top view of the single electron transistor shownin FIG. 1A;

FIG. 2 illustrates a top view of a single electron transistor inaccordance with another example embodiment;

FIG. 3 illustrates a cross-sectional view of a single electrontransistor in accordance with another example embodiment;

FIGS. 4A-4T illustrate perspective views of stages in a method ofmanufacturing a single electron transistor in accordance with an exampleembodiment;

FIGS. 4KS-4NS, 4OS-1, 4OS-2, 4PS-4RS, 4SS-1, 4SS-2 and 4TS illustrateselective cross-sectional views of the method shown in FIGS. 4A-4T; and

FIGS. 4RT, 4ST-1, 4ST-2 and 4TT illustrate selective top views of themethod shown in FIGS. 4A-4T.

DETAILED DESCRIPTION OF THE INVENTION

Korean Patent Application No. 2006-97507, filed on Oct. 4, 2006, in theKorean Intellectual Property Office, and entitled: “Single ElectronTransistor and Method of Manufacturing the Same,” is incorporated byreference herein in its entirety.

Example embodiments will now be described more fully hereinafter withreference to the accompanying drawings; however, they may be embodied indifferent forms and should not be construed as limited to theembodiments set forth herein. Rather, these embodiments are provided sothat this disclosure will be thorough and complete, and will fullyconvey the scope of the invention to those skilled in the art. In thefigures, the dimensions of layers and regions may be exaggerated forclarity of illustration. Like reference numerals refer to like elementsthroughout.

FIG. 1A illustrates a cross-sectional view of a single electrontransistor in accordance with an example embodiment, and FIG. 1Billustrates a top view of the single electron transistor shown in FIG.1A.

Referring to FIGS. 1A and 1B, the single electron transistor may includea sacrificial layer pattern 2, source/drain layers 3, and a gateelectrode 5 on a substrate 1. The substrate 1 may be, e.g., asemiconductor substrate. The substrate 1 may include silicon. In animplementation, the substrate 1 may include single crystalline silicon.The single electron transistor may also include a nanowire channel 4between each of the source/drain layers 3, and an oxide layer 7. Thenanowire channel 4 may include a first oxide channel region 6 a, asecond oxide channel region 6 b and a quantum dot 8.

An upper portion of the substrate 1 may protrude in a third direction D3substantially perpendicular to a plane of the major portion substrate 1,and a sacrificial layer pattern 2 may be formed on the protruding upperportion of the substrate 1.

The sacrificial layer pattern 2 may include a material having an etchingselectivity with respect to the substrate 1 and the source/drain layers3. In an implementation, the sacrificial layer pattern 2 may includesilicon germanium. The sacrificial layer pattern 2 may be patterned froma sacrificial layer that is used in a process for forming the nanowirechannel 4, as described below. In another implementation (not shown),forming the nanowire channel may be performed without the sacrificiallayer pattern 2.

The source/drain layers 3 may be formed on the sacrificial layer pattern2. In implementation, the source/drain layers 3 may includeimpurity-doped single crystalline silicon.

The nanowire channel 4 may connect the source/drain layers 3 to eachother. The source/drain layers 3 may be separated in a first direction,e.g., in the direction D1 in FIG. 1A, and the nanowire channel may forma bridge therebetween. The nanowire channel 4 may be generallycylindrical, and may have a circular cross-section, an ellipticalcross-section, etc. The nanowire channel 4 may extend in a lengthwisedirection in parallel with the first direction D1. In an implementation,the nanowire channel 4 may include single crystalline silicon.

Referring to FIG. 1B, in an example embodiment, two or more nanowirechannels 4 may be disposed between the source/drain layers 3. Each ofthe nanowire channels 4 may have the first oxide channel region 6 a,i.e., an oxide region, at a central portion thereof, so that portions ofeach nanowire channel 4 may be insulated from each other. In anotherimplementation (not shown), a plurality of the first oxide channelregions 6 a may be formed in each nanowire channel 4.

One or more second oxide channel regions 6 b, i.e., oxide regions, maybe formed at portions of the nanowire channel 4 adjacent to a surface ofthe gate electrode 5, so that portions of each nanowire channel 4 may beinsulated from one another.

Referring to FIG. 1A, in an example embodiment, two quantum dots 8 maybe formed in each of the nanowire channels 4, the quantum dots 8 beinginsulated from each other by the first oxide channel region 6 a anddefined by the first and second oxide channel regions 6 a and 6 b. In animplementation, the quantum dots 8 may have a thickness, e.g., adiameter, of about 2 nm to about 5 nm.

The gate electrode 5 may extend in a second direction D2 substantiallyperpendicular to the first direction D1 and may have a predeterminedheight. The gate electrode 5 may enclose the portion of the nanowirechannel 4 in which the quantum dots 8 are located. The gate electrode 5may include, e.g., a metal nitride such as titanium nitride, tantalumnitride, etc., or a metal such as titanium, tantalum, etc.

The oxide layer 7 may be formed on the substrate 1, the sacrificiallayer pattern 2, the source/drain layers 3, the nanowire channel 4and/or the gate electrode 5.

The single electron transistor (SET) may be a gate-all-around (GAA) typesemiconductor device in which the gate electrode 5 encloses the nanowirechannel 4. A single electron in the SET may enter and leave the quantumdot 8 so that an on-state and an off-state may be generated. Accordingto an embodiment, the quantum dot 8 may be formed to a predeterminedsize, e.g., several nanometers, using an oxidation process to form thefirst and second oxide channel regions 6 a and 6 b in the nanowirechannel 4. Thus, a semiconductor device including the SET may operate ata relatively low power consumption.

FIG. 2 illustrates a top view of a SET in accordance with anotherexample embodiment.

Referring to FIG. 2, the SET may have the substrate 1, the source/drainregions 3, the nanowire channel 4, the gate electrode 5 and the oxidelayer 7. In this example embodiment, the SET may have one nanowirechannel 4. As shown in FIG. 1A, two quantum dots 8 may be formed in thenanowire channel 4 enclosed by the gate electrode 5, and each quantumdot may contain one electron.

FIG. 3 illustrates a cross-sectional view of a SET in accordance withanother example embodiment.

Referring to FIG. 3, the SET may have the substrate 1, the sacrificiallayer pattern 2, the source/drain regions 3, the nanowire channel 4, thegate electrode 5 and the oxide layer 7. The SET may not include thefirst oxide channel region 6 a (see FIG. 1A), such that the nanowirechannel 4 may have one quantum dot 8 that may contain one electron. Thesemiconductor device may have one, two, or more nanowire channels 4.

As described above, the SET in accordance with example embodiments maybe a GAA type semiconductor device, and may have one or more quantumdots according to the number of the nanowire channels and/or the numberof the oxide channel regions. In an implementation, the semiconductordevice may serve as a quantum-dot cellular automata (QCA) when aplurality of the quantum dots is arranged to form a quantum dot array.

FIGS. 4A-4T illustrate perspective views of stages in a method ofmanufacturing a single electron transistor in accordance with an exampleembodiment. Additionally, selective cross-sectional views, identified bya suffix “S,” and selective top views, identified by a suffix “T,”illustrate additional views of the method illustrated in FIGS. 4A-4T.

Referring to FIG. 4A, a first sacrificial layer 20, a channel layer 30and a first mask layer 40 may be formed on a substrate 10, e.g., asemiconductor substrate.

The semiconductor substrate 10 and the channel layer 30 may be formedusing, e.g., silicon. In an implementation, the semiconductor substrate10 and the channel layer 30 may be formed using single crystal silicon.

The sacrificial layer 20 may be partially removed in a subsequentprocess, described below, and thus may be formed using a material havingan etching selectivity with respect to the channel layer 30. In animplementation, the sacrificial layer 20 may be formed using silicongermanium, e.g., using an epitaxial growth process. The channel layer 30may be also formed by an epitaxial growth process.

The first mask layer 40 may be formed using a material having an etchingselectivity with respect to the channel layer 30, the sacrificial layer20 and the semiconductor substrate 10, so as to be used as an etchingmask in a subsequent process. For example, the first mask layer 40 maybe formed using a nitride such as silicon nitride. In an implementation(not shown), a pad oxide layer may be further formed between the channellayer 30 and the first mask layer 40.

Referring to FIG. 4B, the first mask layer 40 may be patterned to extendin the first direction D1. Thus, a plurality of first masks 42 having afirst opening 51 therebetween may be formed to partially expose thechannel layer 30. The first masks 42 may be formed by a generalphotolithography process using a first photoresist layer (not shown).The plurality of the first masks 42 may be disposed in a seconddirection D2 substantially perpendicular to the first direction D1.

Referring to FIG. 4C, the channel layer 30, the sacrificial layer 20 andthe semiconductor substrate 10 may be partially removed, e.g., using anetching process using the first masks 42 as etching masks, so that asecond opening 52 partially exposing an upper face of the semiconductorsubstrate 10 is formed. In another implementation (not shown), theportion of the semiconductor substrate 10 may not be removed by theetching.

The etching may form a preliminary sacrificial layer pattern 22 and apreliminary channel layer pattern 32 on the semiconductor substrate 10.The etching process may include, e.g., a dry etching process using anetching gas or a wet etching process using an etching solution. When thesemiconductor substrate 10, the sacrificial layer 20 and the channellayer 30 are formed using silicon, silicon germanium and silicon,respectively, examples of the etching solution may include a mixedsolution containing hydrogen peroxide, hydrogen fluoride and aceticacid, a mixed solution containing ammonium hydroxide, hydrogen peroxideand deionized water, a solution containing peracetic acid, etc.

When a plurality of the first masks 42 is formed, a plurality of thesecond openings 52 may be disposed in the second direction D2.Hereinafter, a sub-area A disposed between two of the second openings 52will be described for simplicity.

Referring to FIG. 4D, the first mask 42 may be trimmed to form a maskpattern 44 so that an upper face of the preliminary channel layerpattern 32 may be partially exposed. For example, a portion of the firstmask 42 that extends in the first direction D1 may be removed so thatthe upper face of the preliminary channel layer pattern 32 may bepartially exposed. When the first mask 42 is formed using a nitride suchas silicon nitride, the first mask 42 may be trimmed by a wet etchingprocess, e.g., using phosphoric acid.

The preliminary channel layer pattern 32 may have a first width W1 andthe mask pattern 44 may have a second width W2 smaller than the firstwidth W1. A difference between the first and second widths W1 and W2 maybe proportional to a diameter of a nanowire channel that is subsequentlyformed, as described in detail below. Thus, when the mask pattern 44 isformed, the first mask 42 may be trimmed in consideration of thediameter of the nanowire channel. Accordingly, the diameter of thenanowire channel may be precisely determined.

Referring to FIG. 4E, a first insulation layer 60 may be formed on thesemiconductor substrate 10 to cover the mask pattern 44, the preliminarychannel layer pattern 32 and the preliminary sacrificial layer pattern22. The first insulation layer 60 may be formed using, e.g., an oxidesuch as silicon oxide. The first insulation layer 60 may be partiallyremoved until a top surface of the mask pattern 44 is exposed. The topsurface of the first insulation layer 60 and a top surface of the maskpattern 44 may be partially removed by, e.g., planarizing with achemical mechanical polishing (CMP) process, an etch-back process, acombination process of CMP and etch-back, etc.

Referring to FIG. 4F, a second insulation layer 70 and a second masklayer 80 may be formed on the first insulation layer 60 and the maskpattern 44. The second insulation layer 70 may be formed using amaterial substantially the same as that of the first insulation layer60, or a material different therefrom. The second insulation layer 70may be formed using a material having an etching selectivity withrespect to the second mask layer 80, the mask pattern 44, thepreliminary channel layer pattern 32 and the preliminary sacrificiallayer pattern 22. In an implementation, the second insulation layer 70may be formed using an oxide.

The second mask layer 80 may be formed using a material substantiallythe same as that of the first mask layer 40, or a material differenttherefrom. The second mask layer 80 may be formed using a materialhaving an etching selectivity with respect to the second insulationlayer 70, the mask pattern 44, the preliminary channel layer pattern 32and the preliminary sacrificial layer pattern 22. In an implementation,the second mask layer 80 may be formed using a nitride.

Referring to FIG. 4G, the second mask layer 80 may be patterned toextend in the second direction D2. Thus, a second mask 82 having a thirdopening 53 therethrough, which partially exposes the second insulationlayer 70, may be formed. The second mask 82 may be formed by a generalphotolithography process using a second photoresist layer (not shown).

Referring to FIG. 4H, a portion of the second insulation layer 70exposed by the third opening 53 may be removed, e.g., using an etchingprocess using the second mask 82 as an etching mask, to form a fourthopening 54 partially exposing the mask pattern 44 and the firstinsulation layer 60. Thus, a second insulation layer pattern 72 may beformed on the mask pattern 44 and the first insulation layer 60. Theetching process may include, e.g., a dry etching process using anetching gas or a wet etching process using an etching solution. When thesecond insulation layer 70 is formed using an oxide such as siliconoxide, the etching solution may include a mixed solution containingnitric acid and hydrofluoric acid.

Referring to FIG. 4I, a portion of the mask pattern 44 exposed by thefourth opening 54 may be removed, e.g., using an etching process usingthe second mask 82, the second insulation layer pattern 72 and a portionof the first insulation layer 60 that is exposed using the fourthopening 54 as etching masks, so as to form a fifth opening 55 partiallyexposing the preliminary channel layer pattern 32. The etching processmay include a dry etching process using an etching gas. A portion of thepreliminary channel layer pattern 32 exposed by the fifth opening 55 anda portion of the preliminary sacrificial layer pattern 22 disposedbeneath the exposed portion of the preliminary channel layer pattern 32may be removed by the dry etching process.

As described above, the first width W1 of the preliminary channel layerpattern 32 may be greater than the second width W2 of the mask pattern44, and portions of the preliminary channel layer pattern 32 and thepreliminary sacrificial layer pattern 22, which correspond to the secondwidth W2, may be removed. However, other portions of the preliminarychannel layer pattern 32 and the preliminary sacrificial layer pattern22 may remain intact. Thus, a sixth opening 56 (see FIG. 4J) exposing aportion of the semiconductor substrate 10 may be formed, and a firstsacrificial layer pattern 25 and a channel layer pattern 35 may beformed on another portion of the semiconductor substrate 10 that is notexposed by the sixth opening 56.

Portions of the mask pattern 44, the preliminary channel layer pattern32 and the preliminary sacrificial layer pattern 22 that are disposedbeneath the second mask 82 and the second insulation layer pattern 72may not be exposed by the fifth opening 55 and may not be removed in thedry etching process. Thus, these portions may remain on thesemiconductor substrate 10.

Referring to FIG. 4J, a portion of the first insulation layer 60 exposedby the fourth opening 54 may be removed to form a seventh opening 57having the channel layer pattern 35 and the first sacrificial layerpattern 25 therein. The seventh opening 57 may be formed by, e.g., a dryetching process using an etching gas or by a wet etching process usingan etching solution. When the first insulation layer 60 is formed usingan oxide such as silicon oxide, the etching solution may include a mixedsolution containing nitric acid and hydrofluoric acid.

Referring to FIGS. 4K and 4KS, the first sacrificial layer pattern 25may be removed by an etching process so that the channel layer pattern35 may be transformed to a nanowire channel 37. The first sacrificiallayer pattern 25 may be removed by, e.g., a wet etching process using anetching solution or an isotropic plasma etching process using an etchinggas. The etching solution may include a solution having an etchingselectivity between those of silicon germanium and silicon, and betweenthose of silicon germanium and oxide. The isotropic plasma etchingprocess may be performed under an atmosphere having mixed gas includinghydrogen bromide and oxygen.

When the first sacrificial layer pattern 25 is removed by the etchingprocess, a portion of the channel layer pattern 35 and a portion of thesemiconductor substrate 10 may also be etched, in which case a nanowirechannel 37 having a size smaller than that of the channel layer pattern35 may be formed.

The nanowire channel 37 may have a square pillar shape, or may have thecircular cylinder or an elliptic cylindrical shape shown in FIG. 4K.When the nanowire channel 37 has the square pillar shape, an annealingprocess may be performed on the nanowire channel 37 under a hydrogenatmosphere so that an edge portion of the nanowire channel 37 may berounded. The annealing process may be performed at a temperature ofabout 800° C. to about 1,000° C. under a pressure below about 10 Torrfor about 100 seconds to about 1,000 seconds. When the edge portion ofthe nanowire channel 37 is rounded by the annealing process, an area atwhich a nanowire channel is surrounded by a gate electrode 122 (see FIG.4S) may be increased, so that a short channel effect may be reduced andcharacteristics of a gate insulation layer (not shown) may be improved.

When the portion of the preliminary channel layer pattern 32 exposed bythe fifth opening 55 is removed by a dry etching process to form thechannel layer pattern 35, a relatively small amount of the portion maybe etched at a region near the remaining preliminary channel layerpattern 32, so that the channel layer pattern 35 may have a rounded endportion. Thus, the nanowire channel 37 that is transformed from thechannel layer pattern 35 may also have a rounded end portion (see FIG.4ST-1).

Referring to FIGS. 4L and 4LS, a second sacrificial layer 90 may beformed on a bottom and a sidewall of the seventh opening 57, on thesecond mask 82, and covering the nanowire channel 37. The secondsacrificial layer 90 may be formed using a material having an etchingselectivity with respect to the second mask 82, the second insulationlayer pattern 72, the first insulation layer 60, the mask pattern 44,the nanowire channel 37, the preliminary channel layer pattern 32, thepreliminary sacrificial layer pattern 22 and the semiconductor substrate10, in consideration of a subsequent etching process. In animplementation, the second sacrificial layer 90 may be formed usingpolysilicon by a chemical vapor deposition (CVD) process.

Referring to FIGS. 4M and 4MS, the second sacrificial layer 90 may bepartially removed, e.g., using a dry etching process, to form a secondsacrificial layer pattern 92. A portion of the second sacrificial layer90 on the nanowire channel 37 may be etched so that a vertical thicknessof the portion of the second sacrificial layer 90 on the nanowirechannel 37 is decreased. A space defined by the second sacrificial layerpattern 92 may form an eighth opening 58.

Referring to FIGS. 4N and 4NS, an exposed top surface of the secondsacrificial layer pattern 92 may be oxidized to form a first oxide layer100. Additionally, a portion of the nanowire channel 37 adjacent to theeighth opening 58 may be oxidized to form a first oxide channel region37 a. For example, the top surface of the second sacrificial layerpattern 92 including polysilicon may be oxidized by a first oxidizationprocess in which a heat treatment is performed under an oxygenatmosphere. In the first oxidization process, the portion of thenanowire channel 37 adjacent to the eighth opening 58 may also beoxidized to form the first oxide channel region 37 a. Thus, the nanowirechannel 37 may be divided into two portions insulated from each other,corresponding to the oxidation of the top surface of the secondsacrificial layer pattern 92 contacting the nanowire channel 37.

Notably, the first oxide channel region 37 a may be controllably formedas a result of the vertical thickness of the second sacrificial layerpattern 92, which is deposited on the nanowire channel 37, beingdecreased by the above-described dry etching process. Moreover, evenwhen the nanowire channel 37 is not divided into the two portionsinsulated from each other after performing the first oxidizationprocess, the nanowire channel 37 may nonetheless be divided into twoportions insulated from each other by a second oxidization process.

A vertical thickness of the second sacrificial layer pattern 92deposited on a predetermined portion of the nanowire channel 37 may bevaried by controlling an etching degree for the corresponding portion ofthe second sacrificial layer 90. Thus, a location of the first oxidechannel region 37 a, which may be formed beneath the portion of thesecond sacrificial layer pattern 92 that has the reduced thickness as aresult the first oxidization process, may be adjusted.

In another implementation (not shown), a plurality of quantum dots 8insulated from one another by the first oxide channel regions 37 a maybe formed in the nanowire channel 37 by forming a plurality of the firstoxide channel regions 37 a in the nanowire channel 37.

Referring to FIGS. 4O and 4OS-1, the first oxide layer 100 and thesecond sacrificial layer pattern 92 may be removed by an etchingprocess, and thus the seventh opening 57 having the nanowire channel 37therein may again be formed as shown in FIGS. 4K and 4KS. In an exampleembodiment of the present invention, the first oxide layer 100 is firstremoved by a dry etching process and then the second sacrificial layerpattern 92 is removed by a wet etching process. When the first oxidelayer 100 is removed, the first oxide channel regions 37 a may not beremoved because the first oxide channel regions 37 a is disposed farfrom an upper face of the first oxide layer 100. The nanowire channel 37in FIGS. 4O and 4OS-1 may have the first oxide channel region 37 a at acentral portion thereof, in contrast to the nanowire channels shown inFIGS. 4K and 4KS.

Referring to FIG. 4OS-2, surfaces of the nanowire channel 37, thepreliminary channel layer pattern 32, the preliminary sacrificial layerpattern 22 and the semiconductor substrate 10, each of which may includesilicon, may be oxidized to form a second oxide layer 110 using a secondoxidization process. As described above, if the first oxide channelregion 37 a is not sufficiently formed in the nanowire channel 37 by thefirst oxidization process, the first oxide channel region 37 a may besupplemented by forming the second oxide layer 110 in the secondoxidization process.

Referring to FIGS. 4P and 4PS, a gate conductive layer 120 may be formedon the semiconductor substrate 10 to fill the seventh opening 57. Thegate conductive layer 120 may be formed using, e.g., a metal nitridesuch as titanium nitride, tantalum nitride, etc., or a metal such astitanium, tantalum, etc. In an implementation, the gate conductive layer120 may be formed using titanium nitride.

Referring to FIGS. 4Q and 4QS, the second mask 82, the second insulationlayer pattern 72 and the mask pattern 44 may be removed, and the firstinsulation layer 60 may be partially removed to form a first insulationlayer pattern 62. The second mask 82, the second insulation layerpattern 72, the mask pattern 44 and the first insulation layer 60 may beremoved by, e.g., a wet etching process using an etching solution or adry etching process using an etching gas.

Referring to FIGS. 4R, 4RS and 4RT, the first insulation layer pattern62 may be removed by an etching process.

Referring to FIGS. 4S, 4SS-1 and 4ST-1, the gate conductive layer 120may be partially removed to form a gate electrode 122 having a sizesmaller than that of the gate conductive layer 120. The gate conductivelayer 120 may be removed by, e.g., a stripping process and/or an ashingprocess, or by a wet etching process. In an implementation, thestripping process may be performed using polyacrylonitrile (PAN). Aportion of the second oxide layer 110 formed on the gate conductivelayer 120 may also be removed to form a second oxide layer pattern 112.The second oxide layer pattern 112 may serve as a gate insulation layer.

A portion of the nanowire channel 37 covered by the gate conductivelayer 120 may be outwardly exposed when the gate conductive layer 120 ispartially removed. Additionally, the remaining preliminary channel layerpattern 32 and the gate electrode 122 may not make direct contact witheach other.

Referring to FIGS. 4SS-2 and 4ST-2, surfaces of the nanowire channel 37,the preliminary channel layer pattern 32, the preliminary sacrificiallayer pattern 22 and the semiconductor substrate 10, each of which mayinclude silicon, may be oxidized so as to form a third oxide layer 130by a third oxidization process, e.g., in which a heat treatment isperformed under an oxygen atmosphere. The third oxide layer 130 may befurther formed on a surface of the gate electrode 122 including a metal.

Additionally, a second oxide channel region 37 b, insulating portions ofthe nanowire channel 37 from one another, may be formed at a portion ofthe nanowire channel 37 adjacent to a surface of the gate electrode 122.Thus, quantum dots 38, insulated from each other by the first and secondoxide channel regions 37 a and 37 b, may be formed in the nanowirechannel 37.

In an example embodiment, two quantum dots 38 are formed in the nanowirechannel 37. In another embodiment, when the second sacrificial layer 90is transformed into the second sacrificial layer pattern 92 by a dryetching process, some portions of the second sacrificial layer 90 may beetched much more than other portions, so that a plurality of the firstoxide channel region 37 a may be formed in the first oxidizationprocess. Thus, more than two quantum dots 38 may be formed in thenanowire channel 37.

Referring to FIGS. 4T, 4TS and 4TT, impurities may be implanted into thepreliminary channel layer pattern 32 to form source/drain layers 34, andthus a SET having quantum dots 38 in the nanowire channel 37 may becompleted.

The SET illustrated in FIG. 2 may be completed by forming one nanowirechannel 37 instead of forming two nanowire channels 37. Additionally,the SET illustrated in FIG. 3 may be formed by omitting the process forforming the first oxide channel region 37 a.

As described above, example embodiments may provide a SET including aquantum dot having a predetermined size, e.g., several nanometers, andin a predetermined location. Thus, a GAA-type SET may be easilymanufactured. A plurality of the quantum dots may be easily formed atdesired locations in a nanowire channel. Thus, a SET having a goodreliability may be easily manufactured, and the SET may operate withrelatively low power consumption.

As described herein, when a layer or element is referred to as being“on” another layer or substrate, it can be directly on the other layeror substrate, or intervening layers may also be present. When a layer isreferred to as being “under” another layer, it can be directly under,and one or more intervening layers may also be present. When a layer isreferred to as being “between” two layers, it can be the only layerbetween the two layers, or one or more intervening layers may also bepresent. When an element or layer is referred to as being “connected” or“coupled” to another element or layer, it can be directly connected orcoupled to the other element or layer, or intervening elements or layersmay be present. In contrast, when an element is referred to as being“directly connected” or “directly coupled” to another element or layer,no intervening elements or layers are present.

As used herein, the term “and/or” includes any and all combinations ofone or more of the associated listed items. Further, although terms suchas “first,” “second,” “third,” etc., may be used herein to describevarious elements, components, regions, layers and/or sections, theseelements, components, regions, layers and/or sections should not belimited by these terms. These terms are only used to distinguish oneelement, component, region, layer and/or section from another. Thus, afirst element, component, region, layer and/or section could be termed asecond element, component, region, layer and/or section withoutdeparting from the teachings of the embodiments described herein.

Spatially relative terms, such as “beneath,” “below,” “lower,” “above,”“upper,” etc., may be used herein for ease of description to describethe relationship of one element or feature to another element(s) orfeature(s), as illustrated in the figures. It will be understood thatthe spatially relative terms are intended to encompass differentorientations of the device in use or operation in addition to theorientation depicted in the figures. For example, if the device in thefigures is turned over, elements described as “below” or “beneath” otherelements or features would then be oriented “above” the other elementsor features. Thus, the exemplary term “below” can encompass both anorientation of above and below. The device may be otherwise oriented(rotated 90 degrees or at other orientations) and the spatially relativedescriptors used herein interpreted accordingly.

As used herein, the singular forms “a,” “an” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises,”“comprising,” “includes,” and “including” specify the presence of statedfeatures, integers, steps, operations, elements, components, etc., butdo not preclude the presence or addition thereto of one or more otherfeatures, integers, steps, operations, elements, components, groups,etc.

Example embodiments are described herein with reference tocross-sectional illustrations that are schematic illustrations ofidealized example embodiments and/or intermediate structures. As such,variations from the shapes of the illustrations, as a result, forexample, of manufacturing techniques and/or tolerances, may be expected.Thus, the example embodiments described herein should not be construedas limited to the particular shapes of regions illustrated herein, andare to include deviations in shapes that result, for example, frommanufacturing. For example, an implanted region illustrated as arectangle may have rounded or curved features, and/or a gradient ofimplant concentration at its edges, rather than a binary change from animplanted to a non-implanted region. Likewise, a buried region formed byimplantation may result in some implantation in the region between theburied region and the surface through which the implantation takesplace. Thus, the regions illustrated in the figures are schematic innature and their shapes may not illustrate the actual shape of theregion, are not intended to limit the scope of the present invention tothe exact shape illustrated.

Unless otherwise defined, all terms used herein, including technical andscientific terms, have the same meaning as commonly understood by one ofordinary skill in the art. It will be further understood that terms suchas those defined in commonly used dictionaries should be interpreted ashaving a meaning that is consistent with their meaning in the context ofthe relevant art, and not in an idealized or overly formal sense unlessexpressly so defined herein.

Example embodiments have been disclosed herein, and although specificterms are employed, they are used and are to be interpreted in a genericand descriptive sense only and not for purpose of limitation.Accordingly, it will be understood by those of ordinary skill in the artthat various changes in form and details may be made without departingfrom the spirit and scope of the present invention as set forth in thefollowing claims.

1. A method of manufacturing a single electron transistor, comprising:forming source/drain layers disposed apart on a substrate and forming atleast one nanowire channel connecting the source/drain layers; forming asacrificial layer defining a space that overlaps a partial area of thenanowire chennel to select a location for a quantum dot in the nanowirechannel; forming a plurality of oxide channel areas in the nanowirechannel, at least one of the plurality of the oxide channel areas beingformed through the space defined by the sacrificial layer and insulatingat least one portion of the nanowire channel from an adjacent portion ofthe nanowire channel, and the quantum dot being in the at least oneportion of the nanowire channel insulated from the adjacent portion ofthe nanowire channel by the at least one of the plurality of oxidechannel areas; and forming a gate electrode that surrounds the quantumdot.
 2. The method as claimed in claim 1, wherein: forming the pluralityof oxide areas includes forming a first oxide channel area and forming asecond oxide channel area, the first oxide channel area being surroundedby the gate electrode and being formed in the nanowire channel throughthe space defined by the sacrificial layer, and the second oxide channelarea beding disposed adjacent to a first surface of the gate electrode,and the quantum dot is formed between the first and second oxide channelareas.
 3. The method as claimed in claim 2, further comprising formingan oxide layer at the first surface of the gate electrode, such that thesecond oxide channel area is connected to the oxide layer.
 4. The methodas claimed in claim 2, wherein: the plurality of oxide channel areasincludes a third oxide channel area disposed adjacent to a secondsurface of the gate electrode, the second surface being opposite thefirst surface of the gate electrode, and a plurality of quantum dots, atleast certain of the plurality of quantum dots being between the firstoxide channel area and the second oxide channel area or between thefirst oxide channel area and the third oxide channel area.
 5. The methodas claimed in claim 2, wherein forming the plurality of oxide channelareas includes forming an oxide layer on an extending portion of thenanowire channel between the second oxide channel area and an adjacentsource/drain layer.
 6. The method as claimed in claim 1, wherein thequantum dot is formed having a thickness of about 2 to about 5nanometers.
 7. The method as claimed in claim 6, wherein the quantum dotand the nanowire channel have a same thickness.
 8. The method as claimedin claim 1, wherein forming the nanowire channel includes forming atleast two nanowire channels that each connect the source/drain layers 9.The method as claimed in claim 8, wherein: each nanowire channel has atleast one of the plurality of oxide channel areas disposed adjacent to afirst side of the gate electrode, each nanowire channel is surrounded byan channel oxide layer, the channel oxide layer being surrounded by thegate electrode, and an oxide layer is formed at the first side of thegate electrode, the oxide layer being connected to each of the oxidechannel areas adjacent to the first side of the gate electrode.
 10. Themethod as claimed in claim 1, wherein forming the plurality of oxidechannel areas includes oxidizing a portion of the nanowire channeladjacent to a surface of the gate electrode prior to an implanting ofimpurities on the source/drain layers to form a source/drain.
 11. Themethod as claimed in claim 10, further comprising forming an oxide layeron the surface of the gate electrode, the oxide layer being connected tothe plurality of oxidized channel areas of the nanowire channel.
 12. Themethod as claimed in claim 1, wherein forming the plurality of oxidechannel areas in the nanowire channel includes: forming a first oxidechannel area in the nanowire channel such that the first oxide channelarea is surrounded by the gate electrode and is formed through the spacedefined by the sacrificial layer; and forming a second oxide channelarea in the nanowire channel adjacent to a surface of the gateelectrode.
 13. The method as claimed in claim 12, wherein forming thefirst oxide channel area includes, prior to forming the gate electrode:forming a first sacrificial material on the nanowire channel; partiallyetching the first sacrificial material to form a thinned portion of thefirst sacrificial material to effect the forming of the sacrificiallayer; oxidizing a portion of the nanowire channel that corresponds tothe thinned portion of the first sacrificial material; and removing thefirst sacrificial material from the nanowire channel after theoxidizing.
 14. The method as claimed in claim 13, further comprising,after removing the first sacrificial material, oxidizing a surface ofthe nanowire channel to form an oxide layer thereon with an oxidizedsurface, such that, after forming the gate electrode, the oxidizedsurface of the nanowire channel is between the nanowire channel and thegate electrode.
 15. The method as claimed in claim 12, wherein formingthe second oxide channel area includes: forming an oxide layer at asurface of the gate electrode, and oxidizing a portion of the nanowirechannel, wherein the oxidized portion of the nanowire channel isconnected to the oxide layer.
 16. The method as claimed in claim 1,wherein forming the nanowire channel comprises: forming a sacrificiallayer on the substrate; forming a channel layer on the sacrificiallayer; partially removing the channel layer and the sacrificial layer toform the nanowire channel, the source/drain layers, a first sacrificiallayer pattern beneath the nanowire channel, and a pair of secondsacrificial layer patterns beneath the source/drain layers, wherein thesecond sacrificial layer patterns are disposed apart from each other andare connected by the first sacrificial layer pattern, and thesource/drain layers are connected by the nanowire channel; and removingthe first sacrificial layer pattern from beneath the nanowire channel.17. The method as claimed in claim 16, wherein the channel layerincludes single crystalline silicon, and the sacrificial layer includessilicon germanium.
 18. The method as claimed in claim 1, wherein: thenanowire channel is surrounded by a channel oxide layer, and forming thegate electrode includes: surrounding the nanowire channel between thesource/drain layers with a gate conductive layer; and partially removingthe gate conductive layer to form the gate electrode, the gate electrodebeing disposed apart from the source/drain layers, and the channel oxidelayer being between the nanowire channel and the gate electrode.
 19. Themethod as claimed in claim 1, wherein the plurality of oxide channelareas are spaced apart within the nanowire channel.
 20. A method ofmanufacturing a single electron transistor, comprising: formingsource/drain layers disposed apart on a substrate and forming at leastone nanowire channel connecting the source/drain layers; forming asacrifical layer definging a space that overlaps a partial area of thenanowire channel to select a location for a quantum dot in the nanowirechannel; forming a plurality of oxide channel areas in the nanowirechannel, at least one of the oxide channel areas being formed in thenanowire channel through the space defined by the sacrificial layer andinsulating at least one portion of the nanowire channel, and the quantumdot being in the at least one portion of the nanowire channel insulatedby the at least one of the oxide channel areas; and forming a gateelectrode that surrounds the quantum dot, wherein: prior to forming thegate electrode, the forming of the at least one of the oxide channelareas includes: forming a first sacrificial material on the nanowirechannel; partially etching the first sacrificial material to form athinned portion of the first sacrificial material to effect the formingof the sacrificial layer; oxidizing a portion of the nanowire channelthat corresponds to the thinned portion of the first sacrificialmaterial; and removing the first sacrificial material from the nanowirechannel after the oxidizing.